MICROELECTROMECHANICAL SENSORS AUTOMATED TESTING SYSTEM
نویسندگان
چکیده
منابع مشابه
Magnetic Field Sensors Based on Microelectromechanical Systems (MEMS) Technology
Nowdays there is an increasing requirement for magnetic devices with improved sensitivity and resolution, trying to keep as low as possible their cost and power consumption. Additionally there is the need to develop compact devices with several sensors able to measure different parameters including magnetic field, pressure, temperature, acceleration. In this way a multifunctional device could b...
متن کاملPiezoelectric microelectromechanical resonant sensors for chemical and biological detection.
Piezoelectric microelectromechanical systems (MEMS) resonant sensors, known for their excellent mass resolution, have been studied for many applications, including DNA hybridization, protein-ligand interactions, and immunosensor development. They have also been explored for detecting antigens, organic gas, toxic ions, and explosives. Most piezoelectric MEMS resonant sensors are acoustic sensors...
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ژورنال
عنوان ژورنال: Electronics and Control Systems
سال: 2017
ISSN: 1990-5548
DOI: 10.18372/1990-5548.53.12139